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2 The Guide describes metrology techniques that are applicable to both temporary and permanently BWSs
FPD用ガラス基板の耐薬品性テストのための3つの方法を定義する。 A：重量変化法
previously published June 2009
7 The alternative measurement process in this Guide is suitable for use in materials acceptance and process control
C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality StdPbc-0124 2 The Guide describes metrologyThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in March 2012; originally published in 1995; previously published June 2000. NOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C70. To define the specification and analytical